JPH0429654U - - Google Patents
Info
- Publication number
- JPH0429654U JPH0429654U JP6811590U JP6811590U JPH0429654U JP H0429654 U JPH0429654 U JP H0429654U JP 6811590 U JP6811590 U JP 6811590U JP 6811590 U JP6811590 U JP 6811590U JP H0429654 U JPH0429654 U JP H0429654U
- Authority
- JP
- Japan
- Prior art keywords
- planet
- semiconductor wafer
- evaporation source
- deposition
- holding jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims 3
- 230000008021 deposition Effects 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6811590U JPH0754286Y2 (ja) | 1990-06-27 | 1990-06-27 | 蒸着用プラネタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6811590U JPH0754286Y2 (ja) | 1990-06-27 | 1990-06-27 | 蒸着用プラネタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0429654U true JPH0429654U (en]) | 1992-03-10 |
| JPH0754286Y2 JPH0754286Y2 (ja) | 1995-12-18 |
Family
ID=31602277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6811590U Expired - Lifetime JPH0754286Y2 (ja) | 1990-06-27 | 1990-06-27 | 蒸着用プラネタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754286Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006001095A1 (ja) * | 2004-06-25 | 2006-01-05 | Showa Shinku Co., Ltd. | 基板ドーム回転機構 |
-
1990
- 1990-06-27 JP JP6811590U patent/JPH0754286Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006001095A1 (ja) * | 2004-06-25 | 2006-01-05 | Showa Shinku Co., Ltd. | 基板ドーム回転機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0754286Y2 (ja) | 1995-12-18 |